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Molecular dynamics simulation of the thermaldynamic effects versus Ge content x in Si1-xGex/Si（100）epitaxy growth
Molecular dynamics simulation epitaxy critical layer thickness Si1-xGex
2007/5/15
The Molecular Dynamics Simulation of epitaxial process of Si1-xGex/Si(100) was carried out by utilizing the Stillinger-Weber potential and Gear algorithm. The thermal dynamic effects due to different ...