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Analysis of Relationship between Inorganic Gases and Fine Particles in Cleanroom Environment
Diffusion denuder system (DDS) AMCs (Airborne Molecular Contaminants) Micro-contamination Cleanroom
2016/3/29
The concentrations and characteristics of major components in inorganic gases and fine particles were measured at the
photo and etch cleanroom areas in a Taiwan semiconductor factory. The results sho...