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Particles Removal by Negative ionic Air Purifier in Cleanroom
Particle Negative air ion Air mixing Removal efficiency Air cleaning factor
2016/3/28
This study investigated effectiveness of negative ionic air purifier in lowering the concentration of particles in a closed
test chamber. The performance test was carried out in a closed test chamber...
Quantitative Techniques for Measuring Cleanroom Wipers with Respect to Airborne Molecular Contamination
Cleanroom Wiper Airborne molecular contamination Particle Ion Nonvolatile residue
2016/3/28
Cleanroom wipers are generally of three classifications, namely, synthetic, natural fibers and blends of fibers. Ultra-fine
split type fiber is mostly selected as the wiper material since cleanrooms ...
Analysis of Relationship between Inorganic Gases and Fine Particles in Cleanroom Environment
Diffusion denuder system (DDS) AMCs (Airborne Molecular Contaminants) Micro-contamination Cleanroom
2016/3/29
The concentrations and characteristics of major components in inorganic gases and fine particles were measured at the
photo and etch cleanroom areas in a Taiwan semiconductor factory. The results sho...
Particle Deposition on a 300 mm Wafer Moving in the Opposite Direction of the Airflow in a Uni-directional Cleanroom
Particle deposition velocity Dynamic Simulation Computational Fluid Dynamics
2016/3/29
An investigation of the particle deposition velocity (vd) onto an upward moving 300 mm (dw) wafer in a cleanroom with
a 0.3 m/s downward velocity (vo) was performed by the dynamic mesh model of FLUEN...