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Application of Poly-Silicon Thin-Film Transistor Re-crystallized by Pulse Laser for Display Devices
Laser beam annealing Low-temperature processing Poly-Si
2009/6/9
Laser re-crystallization is being actively investigated to fabricate low temperature, polycrystalline silicon, thin-film transistors (TFTs) onto glass substrate for use in active-matrix liquid crystal...
We review the field of thin-film silicon solar cells with an active layer thickness of a few micrometers. These technologies can potentially lead to low cost through lower material costs than conventi...