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2017年SPIE微光刻的计量,检查和过程控制会议(Metrology,Inspection,and Process Control for Microlithography XXXI)
2017年 SPIE微光刻的计量,检查和过程控制 会议
2017/1/12
Review conference details by clicking on the titles below. These details include paper titles, authors, schedules and abstracts. View Proceedings from last year.SPIE conference papers are published in...
Nonparametric Multivariate Statistical Process Control
Nonparametric Multivariate Statistical Process Control
2015/3/20
Nonparametric Multivariate Statistical Process Control.
Distribution-Free Multivariate Process Control Based On Log-Linear Modeling
Association Discrete measurements
2015/3/18
This pa p e r c o nsider s sta tistica l pr o cess c o ntr o l (SP C ) w hen the pr o cess mea sur e ment is
multiva r ia te. I n the liter a tur e, mo st existing multiva r ia te SP C pr o cedur es ...
期刊信息
篇名
Iterative Learning Control for Bilinear Industrial Process Control Systems under Steady-state Optimization
语种
英文
撰写或编译
撰写
作者
阮小娥,万百五
第一作者单位
西安交通大学
刊物名称
Journal of Systems Science and Informati...